MET ONE 3411 便携式空气颗粒计数器

随着用于存储大量数据的表面几何空间急剧减少,微电子制造商的颗粒监测变得越来越重要。MET ONE 3411 便携式空气颗粒计数仪的设计,满足半导体洁净室监控、工艺基准确定和颗粒故障解决的独特需要。

便携式空气颗粒计数仪适用于 ISO 14464 中 ISO 1 和 ISO 2 环境部分洁净室验证。 

  • 0.1 微米的灵敏度(范围 0.1 μm-1.0 μm)
  • 顺序采样与可选收集器
  • 排气扇在仪器运行过程中不工作,以减少颗粒的影响
  • 简化了区域、位置和运行参数配置和复制的接口
*本产品仅供工业与科研使用,不用于临床诊断 

 

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功能特点

合规标准

  • 符合 ISO 14644-1  Class 5 的采样标准
  • 符合 ISO 21501-4 准确的工艺基准确定和故障解决功能

数据管理

  • 无线,以太网,串口和 USB 通讯选择
  • 打印或无纸化数据输出
  • 开放的通信体系结构

仪器操作

  • 多达 6 个粒径通道(2.83 LPM 流速(0.1 CFM))
  • 顺序采样能力
  • 长寿命激光技术,提高性能和降低操作成本

应用程序

  • 半导体洁净室分类与监控
  • 持续的环境监测
  • 故障诊断过程

产品规格明细

实验性能 ISO 21501-4 unit-to-unit accuracy & reproducibility
Industry Standards ISO 21501-4 , 21 CFR Part 11, ISO 14644-1:2015, FCC, CE
Light Source Helium neon laser
Coincidence Loss % at 1,765,000 particles/m³ (per ISO 21501-4 method)
Sample Volume 5 µm
实验通量 28.32 L per minute
Reporting EU GMP, ISO 146441-1.2015, FS209E, BS5295, ISO 14644-1:1999
Zero Count ISO 21501-4 & JIS B 9921 (1 count or less in 5 minutes; 95% Upper Confidence Limit)
Counting Efficiency 50% at 0.1 μm (100% for particles > 0.15 μm per ISO 21501-4 & JIS B 9921)
Count Alarms Display and Cycles User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode
产品货号 2088800-03

Content and Resources

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MET ONE 3411 Air Particle Counter Brochure Brochure for the MET ONE 3411 air particle counter
MET ONE 3411 PORTABLE AIRBORNE PARTICLE COUNTER Introducing the MET ONE 3411 0.1 micron sensitivity portable airborne particle counter. Unlike many particle counters the MET ONE 3411 fan remains off when operating in a standard semiconductor cleanroom environment, thus particle generation is virtually eliminated.
Optimizing Workflow Efficiency of Cleanroom Routine Environmental Monitoring Whitepaper by author Tony Harrison, a Compliance and Applications Specialist for Beckman Coulter Life Sciences | Published 2017
Certified Calibration Services for MET ONE Calibration services flyer about audit-quality calibrations for your MET ONE air particle counter

技术文件